Media type: E-Article Title: Microwave plasma: its characteristics and applications in thin film technology Contributor: Musil, J imprint: Elsevier BV, 1986 Published in: Vacuum Language: English DOI: 10.1016/0042-207x(86)90292-7 ISSN: 0042-207X Keywords: Surfaces, Coatings and Films ; Condensed Matter Physics ; Instrumentation Origination: Footnote: