Media type: E-Article Title: Deposition of thin films using microwave plasmas: present status and trends Contributor: Musil, J imprint: Elsevier BV, 1996 Published in: Vacuum Language: English DOI: 10.1016/0042-207x(95)00213-8 ISSN: 0042-207X Keywords: Surfaces, Coatings and Films ; Condensed Matter Physics ; Instrumentation Origination: Footnote: