Media type: E-Article Title: Applications of an infrared laser scan microscope in device testing Contributor: Ziegler, Eberhard Published: Elsevier BV, 1990 Published in: Microelectronic Engineering, 12 (1990) 1-4, Seite 73-80 Language: English DOI: 10.1016/0167-9317(90)90017-n ISSN: 0167-9317 Keywords: Electrical and Electronic Engineering ; Surfaces, Coatings and Films ; Condensed Matter Physics ; Atomic and Molecular Physics, and Optics ; Electronic, Optical and Magnetic Materials Origination: Footnote: