Media type: E-Article Title: Search for the optimum numerical aperture Contributor: Nölscher, Christoph; Mader, Leonhard; Guttenberger, Sabine; Arden, Wolfgang imprint: Elsevier BV, 1990 Published in: Microelectronic Engineering Language: English DOI: 10.1016/0167-9317(90)90092-8 ISSN: 0167-9317 Keywords: Electrical and Electronic Engineering ; Surfaces, Coatings and Films ; Condensed Matter Physics ; Atomic and Molecular Physics, and Optics ; Electronic, Optical and Magnetic Materials Origination: Footnote: