Media type: E-Article Title: Bottom anti-reflective coatings: Control of thermal processing Contributor: Schiltz, A.; Terpan, J-F.; Brun, S.; Paniez, P.J. imprint: Elsevier BV, 1996 Published in: Microelectronic Engineering Language: English DOI: 10.1016/0167-9317(95)00246-4 ISSN: 0167-9317 Keywords: Electrical and Electronic Engineering ; Surfaces, Coatings and Films ; Condensed Matter Physics ; Atomic and Molecular Physics, and Optics ; Electronic, Optical and Magnetic Materials Origination: Footnote: