Media type: E-Article Title: Diffusion inhibition against gold of ion beam synthesized buried silicon nitride layers in silicon Contributor: Skorupa, W.; Knothe, P.; Grötzschel, R. Published: Elsevier BV, 1988 Published in: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 34 (1988) 4, Seite 523-524 Language: English DOI: 10.1016/0168-583x(88)90162-0 ISSN: 0168-583X Keywords: Instrumentation ; Nuclear and High Energy Physics Origination: Footnote: