Media type: E-Article Title: EPR and RBS study of defects produced by MeV ion implantation into silicon Contributor: Sealy, L.; Barklie, R.C.; Reeson, K.J.; Brown, W.L.; Jacobson, D.C. imprint: Elsevier BV, 1992 Published in: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Language: English DOI: 10.1016/0168-583x(92)95261-o ISSN: 0168-583X Keywords: Instrumentation ; Nuclear and High Energy Physics Origination: Footnote: