Media type: E-Article Title: RBS with monolayer resolution Contributor: Kimura, Kenji; Mannami, Michi-hiko imprint: Elsevier BV, 1996 Published in: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Language: English DOI: 10.1016/0168-583x(95)01326-1 ISSN: 0168-583X Keywords: Instrumentation ; Nuclear and High Energy Physics Origination: Footnote: