• Media type: E-Article
  • Title: Modelling of lattice damage accumulation during high energy ion implantation
  • Contributor: Hecking, N.; Kaat, E.H.Te
  • Published: Elsevier BV, 1989
  • Published in: Applied Surface Science, 43 (1989) 1-4, Seite 87-96
  • Language: English
  • DOI: 10.1016/0169-4332(89)90195-5
  • ISSN: 0169-4332
  • Keywords: Surfaces, Coatings and Films ; Condensed Matter Physics ; Surfaces and Interfaces ; General Physics and Astronomy ; General Chemistry
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