Media type: E-Article Title: Silicon direct bonding for sensor applications: Characterization of the bond quality Contributor: Harendt, Christine; Hofflinger, Bernd; Graf, Heinz-Gerd; Penteker, Elisabeth imprint: Elsevier BV, 1990 Published in: Sensors and Actuators A: Physical Language: English DOI: 10.1016/0924-4247(90)87013-9 ISSN: 0924-4247 Keywords: Electrical and Electronic Engineering ; Metals and Alloys ; Surfaces, Coatings and Films ; Condensed Matter Physics ; Instrumentation ; Electronic, Optical and Magnetic Materials Origination: Footnote: