Media type: E-Article Title: Application of nitrogen-implanted silicon for mesa structures and thin membranes Contributor: Gueorguiev, V.K.; Popova, L.I.; Andreev, S.K.; Karpuzov, D.S.; Todorov, S.S.; Chakarov, I.R.; Asenova, D.S. imprint: Elsevier BV, 1992 Published in: Sensors and Actuators B: Chemical Language: English DOI: 10.1016/0925-4005(92)85014-n ISSN: 0925-4005 Keywords: Materials Chemistry ; Electrical and Electronic Engineering ; Metals and Alloys ; Surfaces, Coatings and Films ; Condensed Matter Physics ; Instrumentation ; Electronic, Optical and Magnetic Materials Origination: Footnote: