Media type: E-Article Title: Preface Contributor: Torres, J.; Madar, R.; Chenevier, B. imprint: Elsevier BV, 2006 Published in: Microelectronic Engineering Language: English DOI: 10.1016/j.mee.2006.09.004 ISSN: 0167-9317 Keywords: Electrical and Electronic Engineering ; Surfaces, Coatings and Films ; Condensed Matter Physics ; Atomic and Molecular Physics, and Optics ; Electronic, Optical and Magnetic Materials Origination: Footnote: