Media type: E-Article Title: Through pitch contact hole imaging for the 65nm node Contributor: Kuijten, Jan Pieter; Conley, Will; Verhappen, Arjan; Chaplin, Martin; Socha, Robert; Litt, Lloyd; Warwick, Scott imprint: Elsevier BV, 2006 Published in: Microelectronic Engineering, 83 (2006) 4-9, Seite 1094-1097 Language: English DOI: 10.1016/j.mee.2006.01.168 ISSN: 0167-9317 Keywords: Electrical and Electronic Engineering ; Surfaces, Coatings and Films ; Condensed Matter Physics ; Atomic and Molecular Physics, and Optics ; Electronic, Optical and Magnetic Materials Origination: Footnote: