• Media type: E-Article
  • Title: Application of group electronegativity concepts to the effective work functions of metal gate electrodes on high-κ gate oxides
  • Contributor: Schaeffer, J.K.; Gilmer, D.C.; Capasso, C.; Kalpat, S.; Taylor, B.; Raymond, M.V.; Triyoso, D.; Hegde, R.; Samavedam, S.B.; White, B.E.
  • imprint: Elsevier BV, 2007
  • Published in: Microelectronic Engineering
  • Language: English
  • DOI: 10.1016/j.mee.2007.04.130
  • ISSN: 0167-9317
  • Keywords: Electrical and Electronic Engineering ; Surfaces, Coatings and Films ; Condensed Matter Physics ; Atomic and Molecular Physics, and Optics ; Electronic, Optical and Magnetic Materials
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