Media type: E-Article Title: One-step fabrication of large area arrays of dots by electron beam lithography Contributor: Pérez-Junquera, A.; Martín, J.I.; Alameda, J.M. imprint: Elsevier BV, 2007 Published in: Microelectronic Engineering Language: English DOI: 10.1016/j.mee.2007.01.129 ISSN: 0167-9317 Keywords: Electrical and Electronic Engineering ; Surfaces, Coatings and Films ; Condensed Matter Physics ; Atomic and Molecular Physics, and Optics ; Electronic, Optical and Magnetic Materials Origination: Footnote: