Media type: E-Article Title: Fabrication of anti-reflective structures using hot embossing with a stainless steel template irradiated by femtosecond laser Contributor: Yao, Tsung-Fu; Wu, Ping-Han; Wu, Tzong-Ming; Cheng, Chung-Wei; Yang, Sen-Yeu imprint: Elsevier BV, 2011 Published in: Microelectronic Engineering Language: English DOI: 10.1016/j.mee.2011.03.023 ISSN: 0167-9317 Keywords: Electrical and Electronic Engineering ; Surfaces, Coatings and Films ; Condensed Matter Physics ; Atomic and Molecular Physics, and Optics ; Electronic, Optical and Magnetic Materials Origination: Footnote: