Media type: E-Article Title: Fabrication and characterization of electromagnetically actuated microcantilevers for biochemical sensing, parallel AFM and nanomanipulation Contributor: Nieradka, Konrad; Kopiec, Daniel; Małozięć, Grzegorz; Kowalska, Zuzanna; Grabiec, Piotr; Janus, Paweł; Sierakowski, Andrzej; Domański, Krzysztof; Gotszalk, Teodor Published: Elsevier BV, 2012 Published in: Microelectronic Engineering, 98 (2012), Seite 676-679 Language: English DOI: 10.1016/j.mee.2012.06.019 ISSN: 0167-9317 Origination: Footnote: