Media type: E-Article Title: High aspect ratio pattern collapse of polymeric UV-nano-imprint molds due to cleaning Contributor: Finn, Andreas; Lu, Bo; Kirchner, Robert; Thrun, Xaver; Richter, Karola; Fischer, Wolf-Joachim imprint: Elsevier BV, 2013 Published in: Microelectronic Engineering Language: English DOI: 10.1016/j.mee.2013.02.065 ISSN: 0167-9317 Keywords: Electrical and Electronic Engineering ; Surfaces, Coatings and Films ; Condensed Matter Physics ; Atomic and Molecular Physics, and Optics ; Electronic, Optical and Magnetic Materials Origination: Footnote: