• Media type: E-Article
  • Title: Quantitative analysis of doping profile on beveled p-type GaAs structures by micro-Raman spectroscopy
  • Contributor: Srnanek, R.; Irmer, G.; Donoval, D.; Vincze, A.; Sciana, B.; Radziewicz, D.; Tlaczala, M.
  • Published: Elsevier BV, 2008
  • Published in: Microelectronics Journal, 39 (2008) 12, Seite 1605-1612
  • Language: English
  • DOI: 10.1016/j.mejo.2008.02.019
  • ISSN: 1879-2391
  • Origination:
  • Footnote: