Media type: E-Article Title: Application of selective epitaxy for formation of ultra shallow SiGe-based junctions Contributor: Hållstedt, J.; Isheden, C.; Östling, M.; Baubinas, R.; Matukas, J.; Palenskis, V.; Radamson, H.H. imprint: Elsevier BV, 2004 Published in: Materials Science and Engineering: B Language: English DOI: 10.1016/j.mseb.2004.07.052 ISSN: 0921-5107 Keywords: Mechanical Engineering ; Mechanics of Materials ; Condensed Matter Physics ; General Materials Science Origination: Footnote: