• Media type: E-Article
  • Title: Application of selective epitaxy for formation of ultra shallow SiGe-based junctions
  • Contributor: Hållstedt, J.; Isheden, C.; Östling, M.; Baubinas, R.; Matukas, J.; Palenskis, V.; Radamson, H.H.
  • imprint: Elsevier BV, 2004
  • Published in: Materials Science and Engineering: B
  • Language: English
  • DOI: 10.1016/j.mseb.2004.07.052
  • ISSN: 0921-5107
  • Keywords: Mechanical Engineering ; Mechanics of Materials ; Condensed Matter Physics ; General Materials Science
  • Origination:
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