Media type: E-Article Title: Atomic scale microstructures of high-k HfSiO thin films fabricated by magnetron sputtering Contributor: Talbot, Etienne; Roussel, Manuel; Khomenkova, Larysa; Gourbilleau, Fabrice; Pareige, Philippe imprint: Elsevier BV, 2012 Published in: Materials Science and Engineering: B Language: English DOI: 10.1016/j.mseb.2011.10.011 ISSN: 0921-5107 Keywords: Mechanical Engineering ; Mechanics of Materials ; Condensed Matter Physics ; General Materials Science Origination: Footnote: