• Media type: E-Article
  • Title: 3D active edge silicon sensors: Device processing, yield and QA for the ATLAS-IBL production
  • Contributor: Da Vià, Cinzia; Boscardil, Maurizio; Dalla Betta, GianFranco; Darbo, Giovanni; Fleta, Celeste; Gemme, Claudia; Giacomini, Gabriele; Grenier, Philippe; Grinstein, Sebastian; Hansen, Thor-Erik; Hasi, Jasmine; Kenney, Christopher; Kok, Angela; La Rosa, Alessandro; Micelli, Andrea; Parker, Sherwood; Pellegrini, Giulio; Pohl, David-Leon; Povoli, Marco; Vianello, Elisa; Zorzi, Nicola; Watts, S.J.
  • Published: Elsevier BV, 2013
  • Published in: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 699 (2013), Seite 18-21
  • Language: English
  • DOI: 10.1016/j.nima.2012.05.070
  • ISSN: 0168-9002
  • Keywords: Instrumentation ; Nuclear and High Energy Physics
  • Origination:
  • Footnote: