Media type: E-Article Title: Improved beam spot measurements in the 2nd generation proton beam writing system Contributor: Yao, Yong; van Mourik, Martin W.; Santhana Raman, P.; van Kan, Jeroen A. imprint: Elsevier BV, 2013 Published in: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Language: English DOI: 10.1016/j.nimb.2012.10.033 ISSN: 0168-583X Origination: Footnote: