Media type: E-Article Title: Preparation and optical properties of sputtered-deposition yttrium fluoride film Contributor: Pei, Lei; Jiaqi, Zhu; Yuankun, Zhu; Jiecai, Han imprint: Elsevier BV, 2013 Published in: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Language: English DOI: 10.1016/j.nimb.2013.02.047 ISSN: 0168-583X Origination: Footnote: