Media type: E-Article Title: High voltage time domain response of cMUT membrane: Laser interferometry measurements Contributor: Sénégond, Nicolas; Teston, Franck; Royer, Daniel; Meynier, Cyril; Certon, Dominique imprint: Elsevier BV, 2010 Published in: Physics Procedia Language: English DOI: 10.1016/j.phpro.2010.01.130 ISSN: 1875-3892 Keywords: General Earth and Planetary Sciences ; General Engineering ; General Environmental Science Origination: Footnote: Access State: Open Access