Media type: E-Article Title: Simulation of linear magnetron discharges in 2D and 3D Contributor: Pflug, Andreas; Siemers, Michael; Melzig, Thomas; Schäfer, Lothar; Bräuer, Günter Published: Elsevier BV, 2014 Published in: Surface and Coatings Technology, 260 (2014), Seite 411-416 Language: English DOI: 10.1016/j.surfcoat.2014.09.042 ISSN: 0257-8972 Origination: Footnote: