• Media type: E-Article
  • Title: Study of substrate orientations impact on Ultra Thin Buried Oxide (UTBOX) FDSOI High-K Metal gate technology performances
  • Contributor: Ben Akkez, Imed; Fenouillet-Beranger, Claire; Cros, Antoine; Perreau, Pierre; Haendler, Sébatien; Weber, Olivier; Andrieu, François; Pellissier-Tanon, D.; Abbate, F.; Richard, C.; Beneyton, R.; Gouraud, P.; Margain, A.; Borowiak, C.; Gourvest, E.; Bourdelle, K.K.; Nguyen, B.Y.; Poiroux, T.; Skotnicki, Thomas; Faynot, Olivier; Balestra, Francis; Ghibaudo, Gérard; Boeuf, Fréderic
  • Published: Elsevier BV, 2013
  • Published in: Solid-State Electronics, 90 (2013), Seite 143-148
  • Language: English
  • DOI: 10.1016/j.sse.2013.02.039
  • ISSN: 0038-1101
  • Keywords: Materials Chemistry ; Electrical and Electronic Engineering ; Condensed Matter Physics ; Electronic, Optical and Magnetic Materials
  • Origination:
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