Media type: E-Article Title: Reactive deposition of aluminium-doped zinc oxide thin films using high power pulsed magnetron sputtering Contributor: Ruske, F.; Pflug, A.; Sittinger, V.; Werner, W.; Szyszka, B.; Christie, D.J. Published: Elsevier BV, 2008 Published in: Thin Solid Films, 516 (2008) 14, Seite 4472-4477 Language: English DOI: 10.1016/j.tsf.2007.06.019 ISSN: 0040-6090 Origination: Footnote: