Media type: E-Article Title: ULVAC research and development of Cat-CVD applications Contributor: Asari, Shin; Fujinaga, Tetsushi; Takagi, Makiko; Hashimoto, Masanori; Saito, Kazuya; Harada, Masamichi; Ishikawa, Michio imprint: Elsevier BV, 2008 Published in: Thin Solid Films Language: English DOI: 10.1016/j.tsf.2007.06.209 ISSN: 0040-6090 Keywords: Materials Chemistry ; Metals and Alloys ; Surfaces, Coatings and Films ; Surfaces and Interfaces ; Electronic, Optical and Magnetic Materials Origination: Footnote: