Media type: E-Article Title: High power pulsed magnetron sputtering of transparent conducting oxides Contributor: Sittinger, V.; Ruske, F.; Werner, W.; Jacobs, C.; Szyszka, B.; Christie, D.J. Published: Elsevier BV, 2008 Published in: Thin Solid Films, 516 (2008) 17, Seite 5847-5859 Language: English DOI: 10.1016/j.tsf.2007.10.031 ISSN: 0040-6090 Origination: Footnote: