Media type: E-Article Title: Evolution of etch profile in etching of CoFeB thin films using high density plasma reactive ion etching Contributor: Xiao, Yu Bin; Kim, Eun Ho; Kong, Seon Mi; Chung, Chee Won Published: Elsevier BV, 2011 Published in: Thin Solid Films, 519 (2011) 20, Seite 6673-6677 Language: English DOI: 10.1016/j.tsf.2011.04.198 ISSN: 0040-6090 Keywords: Materials Chemistry ; Metals and Alloys ; Surfaces, Coatings and Films ; Surfaces and Interfaces ; Electronic, Optical and Magnetic Materials Origination: Footnote: