Media type: E-Article Title: Piezoresistive silicon thin film sensor array for biomedical applications Contributor: Alpuim, P.; Correia, V.; Marins, E.S.; Rocha, J.G.; Trindade, I.G.; Lanceros-Mendez, S. Published: Elsevier BV, 2011 Published in: Thin Solid Films, 519 (2011) 14, Seite 4574-4577 Language: English DOI: 10.1016/j.tsf.2011.01.300 ISSN: 0040-6090 Origination: Footnote: