Media type: E-Article Title: Investigation of the effects of bottom anti-reflective coating on nanoscale patterns by laser interference lithography Contributor: Park, Eun-Mi; Choi, Jinnil; Kang, Byung Hyun; Dong, Ki-Young; Park, YunKwon; Song, In Sang; Ju, Byeong-Kwon imprint: Elsevier BV, 2011 Published in: Thin Solid Films Language: English DOI: 10.1016/j.tsf.2011.02.054 ISSN: 0040-6090 Keywords: Materials Chemistry ; Metals and Alloys ; Surfaces, Coatings and Films ; Surfaces and Interfaces ; Electronic, Optical and Magnetic Materials Origination: Footnote: