Media type: E-Article Title: Effect of layout arrangements on strained n-type metal-oxide-semiconductor field-effect transistors with silicon–carbon stressor Contributor: Lee, Chang-Chun; Chang, Shu-Tong; Hsieh, Bing-Fong Published: Elsevier BV, 2012 Published in: Thin Solid Films, 520 (2012) 19, Seite 6282-6286 Language: English DOI: 10.1016/j.tsf.2012.05.082 ISSN: 0040-6090 Keywords: Materials Chemistry ; Metals and Alloys ; Surfaces, Coatings and Films ; Surfaces and Interfaces ; Electronic, Optical and Magnetic Materials Origination: Footnote: