• Media type: E-Article
  • Title: Angle-resolved investigation of ion dynamics in high power impulse magnetron sputtering deposition system
  • Contributor: Čada, Martin; Adámek, Petr; Straňák, Vítězslav; Kment, Štěpán; Olejníček, Jiří; Hubička, Zdeněk; Hippler, Rainer
  • Published: Elsevier BV, 2013
  • Published in: Thin Solid Films, 549 (2013), Seite 177-183
  • Language: English
  • DOI: 10.1016/j.tsf.2013.06.061
  • ISSN: 0040-6090
  • Origination:
  • Footnote: