• Media type: E-Article
  • Title: Imaging modes for potential mapping in semiconductor devices by electron holography with improved lateral resolution
  • Contributor: Sickmann, Jan; Formánek, Petr; Linck, Martin; Muehle, Uwe; Lichte, Hannes
  • imprint: Elsevier BV, 2011
  • Published in: Ultramicroscopy
  • Language: English
  • DOI: 10.1016/j.ultramic.2010.12.016
  • ISSN: 0304-3991
  • Origination:
  • Footnote: