Media type: E-Article Title: Optical and structural properties of highly c-axis oriented aluminum nitride prepared by sputter-deposition in pure nitrogen Contributor: Drüsedau, Tilo P; Bläsing, Jürgen imprint: Elsevier BV, 2000 Published in: Thin Solid Films Language: English DOI: 10.1016/s0040-6090(00)01380-8 ISSN: 0040-6090 Origination: Footnote: