Media type: E-Article Title: Characterization of SiO x N y anti-reflective coatings using SIMS and RBS/HFS Contributor: Saleh, Adli A; Rothman, J.Bruce; Kirchhoff, J.F; Yota, Jiro; Nguyen, Chau imprint: Elsevier BV, 1999 Published in: Thin Solid Films Language: English DOI: 10.1016/s0040-6090(99)00453-8 ISSN: 0040-6090 Keywords: Materials Chemistry ; Metals and Alloys ; Surfaces, Coatings and Films ; Surfaces and Interfaces ; Electronic, Optical and Magnetic Materials Origination: Footnote: