• Media type: E-Article
  • Title: Electrical characterization of defects induced by 12 MeV electrons in p—type Si-SiO2 structures
  • Contributor: Stefanov, KG; Kaschieva, S; Karpuzov, D
  • Published: Elsevier BV, 1998
  • Published in: Vacuum, 51 (1998) 2, Seite 235-237
  • Language: English
  • DOI: 10.1016/s0042-207x(98)00166-3
  • ISSN: 0042-207X
  • Keywords: Surfaces, Coatings and Films ; Condensed Matter Physics ; Instrumentation
  • Origination:
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