• Media type: E-Article
  • Title: Characterisation of DC unbalanced magnetron deposition of Ni⧹C : H composite films
  • Contributor: Zeuner, Michael; Neumann, Horst; Zalman, Jan; Slavínská, Danka; Biederman, Hynek
  • Published: Elsevier BV, 1998
  • Published in: Vacuum, 51 (1998) 3, Seite 417-426
  • Language: English
  • DOI: 10.1016/s0042-207x(98)00187-0
  • ISSN: 0042-207X
  • Keywords: Surfaces, Coatings and Films ; Condensed Matter Physics ; Instrumentation
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