Media type: E-Article Title: Fabrication of buried layers of SiO2 and Si3N4 a using ion beam synthesis Contributor: Reeson, K.J. imprint: Elsevier BV, 1987 Published in: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Language: English DOI: 10.1016/s0168-583x(87)80056-3 ISSN: 0168-583X Keywords: Instrumentation ; Nuclear and High Energy Physics Origination: Footnote: