Media type: E-Article Title: Zinc and group V element co-implantation in indium phosphide Contributor: Yu, Kin Man; Ridgway, M.C Published: Elsevier BV, 2000 Published in: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 168 (2000) 1, Seite 65-71 Language: English DOI: 10.1016/s0168-583x(99)00806-x ISSN: 0168-583X Keywords: Instrumentation ; Nuclear and High Energy Physics Origination: Footnote: