Media type: E-Article Title: Modeling of outgassing or pumping functions of the constituent elements such as chamber walls and high-vacuum pumps Contributor: Yoshimura, Nagamitsu Published: Elsevier BV, 2001 Published in: Applied Surface Science, 169-170 (2001), Seite 685-688 Language: English DOI: 10.1016/s0169-4332(00)00813-8 ISSN: 0169-4332 Origination: Footnote: