Media type: E-Article Title: Characterization of damage in electron cyclotron resonance plasma etched compound semiconductors Contributor: Pearton, S.J. imprint: Elsevier BV, 1997 Published in: Applied Surface Science Language: English DOI: 10.1016/s0169-4332(97)80149-3 ISSN: 0169-4332 Keywords: Surfaces, Coatings and Films ; Condensed Matter Physics ; Surfaces and Interfaces ; General Physics and Astronomy ; General Chemistry Origination: Footnote: