Media type: E-Article Title: Deposition of SiC and AlN thin films by laser ablation Contributor: Meinschien, Jens; Falk, Fritz; Hobert, Hartmut; Stafast, Herbert imprint: Elsevier BV, 1999 Published in: Applied Surface Science Language: English DOI: 10.1016/s0169-4332(98)00451-6 ISSN: 0169-4332 Keywords: Surfaces, Coatings and Films ; Condensed Matter Physics ; Surfaces and Interfaces ; General Physics and Astronomy ; General Chemistry Origination: Footnote: