Media type: E-Article Title: Towards a multiscale approach to the growth of silicon films by chemical vapor deposition Contributor: Masi, Maurizio; Bertani, Valeria; Cavallotti, Carlo; Carrà, Sergio imprint: Elsevier BV, 2000 Published in: Materials Chemistry and Physics Language: English DOI: 10.1016/s0254-0584(00)00323-0 ISSN: 0254-0584 Keywords: Condensed Matter Physics ; General Materials Science Origination: Footnote: