Media type: E-Article Title: Mechanical stress reduction in PECVD a-Si:H thin films Contributor: Garrido Alzar, C.L Published: Elsevier BV, 1999 Published in: Materials Science and Engineering: B, 65 (1999) 2, Seite 123-126 Language: English DOI: 10.1016/s0921-5107(99)00222-6 ISSN: 0921-5107 Keywords: Mechanical Engineering ; Mechanics of Materials ; Condensed Matter Physics ; General Materials Science Origination: Footnote: