Media type: E-Article Title: Large O2 Cluster Ions as Sputter Beam for ToF-SIMS Depth Profiling of Alkali Metals in Thin SiO2 Films Contributor: Holzer, Sabine; Krivec, Stefan; Kayser, Sven; Zakel, Julia; Hutter, Herbert Published: American Chemical Society (ACS), 2017 Published in: Analytical Chemistry, 89 (2017) 4, Seite 2377-2382 Language: English DOI: 10.1021/acs.analchem.6b04222 ISSN: 0003-2700; 1520-6882 Origination: Footnote: