Media type: E-Article Title: Bromine as a Preferred Etchant for Si Surfaces in the Supersaturation Regime: Insights from Calculations of Atomic Scale Reaction Pathways Contributor: Biswas, Sananda; Narasimhan, Shobhana Published: American Chemical Society (ACS), 2016 Published in: The Journal of Physical Chemistry C, 120 (2016) 28, Seite 15230-15234 Language: English DOI: 10.1021/acs.jpcc.6b04450 ISSN: 1932-7447; 1932-7455 Keywords: Surfaces, Coatings and Films ; Physical and Theoretical Chemistry ; General Energy ; Electronic, Optical and Magnetic Materials Origination: Footnote: