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Media type:
E-Article
Title:
High-κ Gate Dielectric on Tunable Tensile Strained Germanium Heterogeneously Integrated on Silicon: Role of Strain, Process, and Interface States
Contributor:
Hudait, Mantu K.;
Clavel, Michael B.;
Karthikeyan, Sengunthar;
Bodnar, Robert J.
Published:
American Chemical Society (ACS), 2023
Published in:
ACS Applied Electronic Materials, 5 (2023) 9, Seite 4792-4804